چکیده مقاله
Microactuators have an extensive application for positioning the microparts in microelectromechanical systems MEMS In recent years, there have been many studies performed on different sorts of microactuators Different systems have been invented for the actuation of microactuators each of which have some advantages and disadvantages and have different applications in different areas Electro thermal actuation systems are used more extensively because of having more displacement and also larger gripping force with less necessary voltage in comparison with other microactuator actuation methods In this paper, a novel microactuator is introduced which is a hybridization of U shaped and V shaped actuators This micro actuator is designed and its performance is verified using coupled thermal –electrical displacement analysis
کلیدواژهها
نویسندگان
H. MajidiFardVatan
M Sc Student of Manufacturing Engineering, University College of Engineering, University of Tehran, Iran
M. Hamedi
Associate Professor of Manufacturing Engineering, University College of Engineering, University of Tehran, Iran
M. Salehi
M Sc Student of Manufacturing Engineering, University College of Engineering, University of Tehran, Iran
H. Salmani Nohouji
M Sc Student of Manufacturing Engineering, University College of Engineering, University of Tehran, Iran
شیوه ارجاع
MajidiFardVatan, H. and Hamedi, M. and Salehi, M. and Salmani Nohouji, H.,1390,A Novel Electro-Thermal Microactuator ; Design and Simulation,12th Iranian Conference on Manufacturing Engineering (ICME 2010),Tehran
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