چکیده مقاله
The function of a micro accelerometer depends on several performance parameters such as resolution, sensitivity and noise level This paper presents design and fabrication of an optimized micro machined out of plane capacitive accelerometer The accelerometer consists of a proof mass and four folded beams fabricated on a 100 μm thick single crystal silicon SCS substrate using high aspect ratio reactive ion etching RIE process The optimization process is carried out by the use of non dominated sorting genetic algorithm NSGA II by considering performance requirements and manufacturing process limitations, such as mask printing resolution and minimum feasible feature size in RIE process The optimization process will present a Pareto optimal front by a set of optimal designs In order to achieve a design with maximum conformity with the read out circuit requirements, a trade off should be made between solutions So the limits for the electrical circuit can be changed without any new optimization process
کلیدواژهها
نویسندگان
A. M. Khodadadi Behtash
Department of Mechanical Engineering, Amirkabir University of Technology, Tehran, Iran
F Barazandeh
Department of Mechanical Engineering, Amirkabir University of Technology, Tehran, Iran
N Sayyaf
Department of Mechanical Engineering, Amirkabir University of Technology, Tehran, Iran
شیوه ارجاع
Khodadadi Behtash, A. M. and Barazandeh, F and Sayyaf, N,1390,Design and Fabrication of an Out of Plane Micro-Inertial Sensor,12th Iranian Conference on Manufacturing Engineering (ICME 2010),Tehran
ارائهشده در
مجموعه مقالات دوازدهمین کنفرانس ملی مهندسی ساخت و تولید ایران6 دی 1390 · تهران