چکیده مقاله
In this study, two novel techniques are presented to investigate pull in voltage of electrostatically actuated micro beams The pull in voltages along with structural and material properties are critical parameters affecting the behaviors of Micro Electro Mechanical MEM actuators The work presented in this paper consists of two major sections The first section deals with studying the pull in voltage and vibrational behavior of an electrostatically actuated fixed fixed micro beam For this purpose, modal characteristics of the micro beam about the equilibrium position are studied using finite element method the results are in good agreement with those presented in the literature In the second section, a cantilever micro beam actuator with electrostatic actuation is considered The pull in voltage and deflection of this actuator is evaluated by modeling and simulating the device in COMSOL multiphysics package, the obtained results are compared with the other previously reported results and good agreements are observed
کلیدواژهها
نویسندگان
S. Zeinali
School of Engineering Emerging Technologies, University of Tabriz, Tabriz, Iran
V. Ansari
Faculty of Mechanical Engineering, University of Tabriz, Tabriz, Iran
M.M.S. Fakhrabadi
School of Mechanical Engineering, College of Engineering, University of Tehran, Tehran, Iran
A. Ghanbari
School of Engineering Emerging Technologies, University of Tabriz, Tabriz, Iran
شیوه ارجاع
Zeinali, S. and Ansari, V. and Fakhrabadi, M.M.S. and Ghanbari, A.,1390,Presentation of Novel Techniques to Investigate the Pull-in Instability of a Micro Beam Subjected to Electrostatic Actuation,12th Iranian Conference on Manufacturing Engineering (ICME 2010),Tehran
ارائهشده در
مجموعه مقالات دوازدهمین کنفرانس ملی مهندسی ساخت و تولید ایران6 دی 1390 · تهران