چکیده مقاله
NiTi based shape memory thin films have attracted much attention in recent years as intelligent and functional materials in the rapidly growing field of Micro Electro Mechanical Systems MEMS and Bio MEMS In this paper the fabrication of NiTi and NiTiHf thin films by a DC magnetron sputtering using simultaneous deposition from elemental targets is reported The characterization of the films were performed using a differential scanning calorimetry DSC and X ray diffractometry XRD to explore transformation temperatures and structure as a function of film composition The results showed that film composition is a critical issue to control transition temperatures The proposed technique can be considered as a flexible fabrication method to control precise film composition, which leads to manufacturing of shape memory microactuators in a wide range of applications
کلیدواژهها
نویسندگان
S Sanjabi
Department of Materials Science andEngineering, Sharif University of Technology,P O Box: ۱۱۳۶۵ ۹۴۶۶, Tehran Iran
S.K Sadrnezhaad
Department of Materials Science andEngineering, Sharif University of Technology,P O Box: ۱۱۳۶۵ ۹۴۶۶, Tehran Iran
Z.H Barber
Device Materials Group, Department of MaterialsScience and Metallurgy, University of Cambridge,CB۲ ۳QZ, UK
شیوه ارجاع
Sanjabi, S and Sadrnezhaad, S.K and Barber, Z.H,1384,Fabrication and Characterization of NiTi-based Shape Memory Thin Films,01st Tehran International Congress on Manufacturing Engineering (TICME2005),Tehran
ارائهشده در
مجموعه مقالات اولین کنفرانس بین المللی و هفتمین کنفرانس ملی مهندسی ساخت و تولید1 فروردین 1384 · تهران