sputtering

Fabrication and Characterization of NiTi-based Shape Memory Thin Films

NiTi based shape memory thin films have attracted much attention in recent years as intelligent and functional materials in the rapidly growing field…

Artificial Neural Networks Modeling on TiN Coating parameters in Sputtering Process

Sputtering is a Physical Vapor Deposition PVD vacuum process used to deposit very thin films onto a substrate for a wide variety of commercial and sc…