چکیده مقاله
This paper addresses a new approach for complete driftmodeling and compensation on the Scanning Probe Microscopes SPMs Drift is described as remained error after hysteresis and creep compensation and could seriously affect the SPM's performance The comprehensive model introduced here is effective, simple and mathematically traceable Although an analytical relation is introduced for heat generation in piezotubes, for piezo scanners, micro cantilever and substrate as micro components, the current relations are used Transfer function analysis is an effective schematical approach for drift showing Comparing experimental results show that in both modes this model is effective and introduces a new approach for velocity independent drift modeling
کلیدواژهها
نویسندگان
S Sadeghzadeh
Ph D Student, Faculty of Mechanical Engineering, Iran University of Science and Technology
M.H Korayem
Professor, Faculty ofMechanical Engineering, Iran University of Science and Technology
شیوه ارجاع
Sadeghzadeh, S and Korayem, M.H,1388,Transfer function analysis for drift compensation in nanomanipulation inverse control,10th Iranian Conference on Manufacturing Engineering (ICME 2010),Babol
ارائهشده در
مجموعه مقالات دهمین کنفرانس ملی مهندسی ساخت و تولید10 اسفند 1388 · بابل