چکیده مقاله
This paper introduces a comprehensive metal microforming system based on 2D relief printing, designed to address the limitations of conventional microelectromechanical systems MEMS fabrication methods Suspending thin wires in thermal flow sensors enhances measurement accuracy due to the low thermal conductivity of air, while semicircular microfluidic channels improve fluidic performance by reducing turbulent flow Conventional techniques such as photolithography and hot embossing face challenges in fabricating suspended structures, semicircular microchannels, and in processing low cost, rigid substrates The proposed integrated system, comprising mechanical and electronic subsystems and a dedicated nozzle, is controlled using optimized G code commands and enables direct printing of resistive and capacitive sensors with significantly reduced fabrication steps Experimental results demonstrate successful printing of linear patterns and suspended electrodes with diameters ranging from 10 to 100 µm on plastic and glass substrates
کلیدواژهها
نویسندگان
Amir Hossein Nabi
Affiliation: Advanced Micro and Nano devices Lab , Department of MEMS and NEMS, School of Intelligent Systems, University of Tehran
Javad Koohsorkhi
Affiliation: Advanced Micro and Nano devices Lab , Department of MEMS and NEMS, School of Intelligent Systems, University of Tehran
شیوه ارجاع
Nabi, Amir Hossein and Koohsorkhi, Javad,1404,Two-dimensional relief metal forming for the fabrication of micron-scale patterns on flat substrates,23th International Conference on Innovation and Research in Engineering Sciences (ICIRES)
ارائهشده در
مجموعه مقالات بیست و سومین کنفرانس بین المللی نوآوری و تحقیق در علوم مهندسی22 اسفند 1404