چکیده مقاله
Euler Bernoulli microcantilevers are an important components of microelectromechanical sensors that are regarded as high sensitivity sensors The sensing principle of such sensors is based on resonant frequency shift or the microcantilever deflection variation Therefore, identification of static and dynamic behavior of such sensors seems necessary In this study, the finite element method was used to predict the static behavior of Euler Bernoulli microcantilevers Four epoxy microcantilevers with different dimensions and specific loadings and boundary conditions were statically analyzed The effect of size on the deflection of microcantilevers were examined and evaluated It was observed that an increased thickness reduces the deflection, and in a given cantilever, the maximum deflection occurs at its end Results were consistent with those obtained using the couple stress, classical, and strain gradient elasticity theories
کلیدواژهها
نویسندگان
Mohammad Tahmasebipour
Faculty of New Sciences and Technologies, University of Tehran, Tehran, Iran , Micro/Nano Manufacturing Technologies Development Laboratory, Faculty of New sciences & Technologies,University of Tehran, Tehran, Iran
Mehrzad Modarres
Faculty of New Sciences and Technologies, University of Tehran, Tehran, Iran , Micro/Nano Manufacturing Technologies Development Laboratory, Faculty of New sciences & Technologies,University of Tehran, Tehran, Iran
Hossein Salarpour
Faculty of New Sciences and Technologies, University of Tehran, Tehran, Iran , Micro/Nano Manufacturing Technologies Development Laboratory, Faculty of New sciences & Technologies,University of Tehran, Tehran, Iran
شیوه ارجاع
Tahmasebipour, Mohammad and Modarres, Mehrzad and Salarpour, Hossein,1396,Comparison of the Finite Element Method with couple stress, classical, and strain gradient elasticity theories in Analysis of Euler-Bernoulli Micro-cantilever Deflection,Fifth International Conference on Electrical and Computer Engineering with Emphasis on Indigenous Knowledge,Tehran
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