چکیده مقاله
This paper presents a novel electrostatic comb drive RF MEMS switches for the purpose of increasing reliability of micro electromechanical switches, some new designs analyzed for elimination of adhesion, friction and dielectric charging in non contact switches, targeted to decrease electrostatic force and applied voltage in the comb driven structure The reason of this choice is simple manufacturing process 1 or 3 masking compared to the other MEMS structures, ability to build with more material, linear functioning without static spring fingers, wide applications in addition to switches, such as Resonators, micro filters, gyroscopes, accelerometers etc
کلیدواژهها
نویسندگان
Faraz delijani
Department of Electrical Engineering Arak Branch, Islamic Azad University
Azim Fard
Communication Regulatory Authority
شیوه ارجاع
delijani, Faraz and Fard, Azim,1396,Improve the reliability and Increased lifetime of Comb Drive structure in RF MEMS Switch,Fifth International Conference on Electrical and Computer Engineering with Emphasis on Indigenous Knowledge,Tehran
ارائهشده در
مجموعه مقالات پنجمین کنفرانس بین المللی مهندسی برق و کامپیوتر با تاکید بر دانش بومی19 بهمن 1396 · تهران