چکیده مقاله
Experimental research has shown that microcantilever based sensors have wide and diverse applications in various fields This necessitates the study of the mechanical behavior of microcantilevers under different resonance modes This study investigated and evaluated the effect of size on the vibration behavior of an epoxy microcantilever in its first four frequency modes using the finite element method Results showed that increased microcantilever thickness reduces resonant frequency Large deformations were observed in the third and fourth frequency modes which increases the risk of failure in the microcantilever Since the deformations in microcantilevers should be low in order for the sensor to have a long operating life, and the sensor has to be highly sensitive for increased accuracy, the second mode of resonant frequency and 20 ʽm were found as the best operating mode and the best thickness of the epoxy microcantilever based sensor, respectively A good agreement was observed between the results of this study and those obtained based on the couple stress theory, classical theory, and strain gradient elasticity theory
کلیدواژهها
نویسندگان
Mohammad Tahmasebipour
Faculty of New Sciences and Technologies, University of Tehran, Tehran, Iran , Micro/Nano Manufacturing Technologies Development Laboratory, Faculty of New sciences & Technologies,University of Tehran, Tehran, Iran
Mehrzad Modarres
Faculty of New Sciences and Technologies, University of Tehran, Tehran, Iran , Micro/Nano Manufacturing Technologies Development Laboratory, Faculty of New sciences & Technologies,University of Tehran, Tehran, Iran
Hossein Salarpour
Faculty of New Sciences and Technologies, University of Tehran, Tehran, Iran , Micro/Nano Manufacturing Technologies Development Laboratory, Faculty of New sciences & Technologies,University of Tehran, Tehran, Iran
شیوه ارجاع
Tahmasebipour, Mohammad and Modarres, Mehrzad and Salarpour, Hossein,1396,Investigation of Natural Frequency of Epoxy Micro-cantilevers via Finite Element Method and couple stress, classical, and strain gradient elasticity theories,Fifth International Conference on Electrical and Computer Engineering with Emphasis on Indigenous Knowledge,Tehran
ارائهشده در
مجموعه مقالات پنجمین کنفرانس بین المللی مهندسی برق و کامپیوتر با تاکید بر دانش بومی19 بهمن 1396 · تهران